Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775691 | Method for examining photolithographic masks and mask metrology apparatus for performing the method | Dirk Hellweg, Renzo Capelli | 2020-09-15 |
| 10573095 | Method and system for the diagnosis or configuration of a vehicle | Gerald Zoppelt, Roland Herberth, Sven Conradi, Ruediger Roppel | 2020-02-25 |
| 10564551 | Method for determining a focus position of a lithography mask and metrology system for carrying out such a method | Dirk Hellweg, Renzo Capelli, Martin Dietzel | 2020-02-18 |