Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Takamitsu Komaki, Nozomu Hayashi | 2020-09-15 |