Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Takamitsu Komaki, Yasuyuki Unno | 2020-09-15 |
| 10732522 | Imprint apparatus and article manufacturing method | Takamitsu Komaki, Yoshiyuki Usui | 2020-08-04 |