Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777440 | Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method | Toshiki Iwai, Yasuyuki Unno, Nozomu Hayashi | 2020-09-15 |
| 10732522 | Imprint apparatus and article manufacturing method | Yoshiyuki Usui, Nozomu Hayashi | 2020-08-04 |
| 10732523 | Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method | — | 2020-08-04 |
| 10545416 | Detection apparatus, lithography apparatus, and method of manufacturing article | Takashi Shibayama | 2020-01-28 |