Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846442 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Hanying Feng | 2020-11-24 |
| 10569469 | Model-based scanner tuning systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2020-02-25 |