Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846442 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Wenjin Shao | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846442 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Wenjin Shao | 2020-11-24 |