Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846442 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Yu Cao, Hanying Feng, Wenjin Shao | 2020-11-24 |
| 10839131 | Three-dimensional mask model for photolithography simulation | Peng Liu, Yu Cao, Luoqi Chen | 2020-11-17 |
| 10795266 | Method of performing model-based scanner tuning | Yu Cao | 2020-10-06 |
| 10592633 | Fast freeform source and mask co-optimization method | Luoqi Chen, Yu Cao | 2020-03-17 |
| 10569469 | Model-based scanner tuning systems and methods | Yu Cao, Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens, James Patrick Koonmen | 2020-02-25 |