Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Laura Maria Fernandez Diaz +3 more | 2020-12-22 |
| 10725390 | Inspection substrate and an inspection method | Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more | 2020-07-28 |