Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859919 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more | 2020-12-08 |
| 10551748 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more | 2020-02-04 |
| 10534270 | Lithography apparatus, a method of manufacturing a device and a control program | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2020-01-14 |