Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847366 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Miika Mattinen, Mikko Ritala | 2020-11-24 |
| 10741403 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2020-08-11 |
| 10731249 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2020-08-04 |
| 10734223 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Miika Mattinen, Mikko Ritala | 2020-08-04 |
| 10619242 | Atomic layer deposition of rhenium containing thin films | Jani Hamalainen, Mikko Ritala | 2020-04-14 |
| 10619244 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2020-04-14 |