Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10731249 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Katja Väyrynen, Mikko Ritala, Markku Leskelä | 2020-08-04 |
| 10619244 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2020-04-14 |