Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847366 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Mikko Ritala, Markku Leskelä | 2020-11-24 |
| 10734223 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Mikko Ritala, Markku Leskelä | 2020-08-04 |