Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790121 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2020-09-29 |
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Zhili Zuo, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |
| 10748797 | Plasma parameters and skew characterization by high speed imaging | Edward P. Hammond, IV, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2020-08-18 |
| 10714319 | Apparatus and methods for removing contaminant particles in a plasma process | Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2020-07-14 |