Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Sidharth Bhatia, Zhili Zuo, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Sidharth Bhatia, Zhili Zuo, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |