Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790121 | Plasma density control on substrate edge | Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2020-09-29 |
| 10748797 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Edward P. Hammond, IV, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2020-08-18 |
| 10714319 | Apparatus and methods for removing contaminant particles in a plasma process | Anup K. Singh, Vivek Shah, Sidharth Bhatia, Ganesh Balasubramanian | 2020-07-14 |
| 10688538 | Aluminum fluoride mitigation by plasma treatment | Vivek Shah, Anup K. Singh, Ganesh Balasubramanian, Bok Hoen Kim | 2020-06-23 |