Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Lara Hawrylchak, Mehran Behdjat, Dietrich Gage, Christopher Dao +2 more | 2020-09-01 |