Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804109 | Surface treatment of silicon and carbon containing films by remote plasma with organic precursors | Michael X. Yang, Xinliang Lu | 2020-10-13 |
| 10692730 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Haichun Yang | 2020-06-23 |