Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804109 | Surface treatment of silicon and carbon containing films by remote plasma with organic precursors | Hua Chung, Xinliang Lu | 2020-10-13 |
| 10760976 | Thermal imaging of heat sources in thermal processing systems | — | 2020-09-01 |
| 10580672 | Systems and methods for workpiece processing | Ryan Pakulski | 2020-03-03 |
| 10573532 | Method for processing a workpiece using a multi-cycle thermal treatment process | Shawming Ma | 2020-02-25 |