Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790119 | Plasma processing apparatus with post plasma gas injection | Shawming Ma, Vladimir Nagorny, Dixit V. Desai | 2020-09-29 |
| 10580672 | Systems and methods for workpiece processing | Michael X. Yang | 2020-03-03 |