Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692730 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Hua Chung | 2020-06-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692730 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Hua Chung | 2020-06-23 |