Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697062 | Gas flow guide design for uniform flow distribution and efficient purge | Chien-Teh Kao, Jeffrey A. Kho, Xiangxin Rui, Jianhua Zhou, Shinichi Kurita +1 more | 2020-06-30 |