Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847368 | EUV resist patterning using pulsed plasma | Sangwook Kim, Seunghyun Park, Abhjeet Bagal, Kyoungjin LEE, Daksh Agarwal | 2020-11-24 |
| 10727075 | Uniform EUV photoresist patterning utilizing pulsed plasma process | Sang-wook Kim, Zhibin Wang, Kyoungjin LEE | 2020-07-28 |
| 10580657 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Sang-wook Kim, Sang-jun Choi | 2020-03-03 |