Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847368 | EUV resist patterning using pulsed plasma | Byungkook Kong, Sangwook Kim, Seunghyun Park, Abhjeet Bagal, Daksh Agarwal | 2020-11-24 |
| 10727075 | Uniform EUV photoresist patterning utilizing pulsed plasma process | Sang-wook Kim, Zhibin Wang, Byungkook Kong | 2020-07-28 |