Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858533 | Anti-reflective hardmask composition | — | 2020-12-08 |
| 10636674 | Control method of dry etching apparatus | Ji Sung Kang, Kyung-Jin Lee | 2020-04-28 |
| 10580657 | Device fabrication via pulsed plasma | Chang Wook Doh, Zhibin Wang, Byungkook Kong, Sang-wook Kim | 2020-03-03 |