Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464953 | Carbon bridged aminosilane compounds for high growth rate silicon-containing films | Xinjian Lei, Manchao Xiao, Suresh K. Rajaraman | 2019-11-05 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2019-10-22 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Xinjian Lei, Anupama Mallikarjunan, Haripin Chandra, Bing Han | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |