Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Jianheng Li | 2019-09-24 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Haripin Chandra, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Richard Ho, Daniel P. Spence, Xinjian Lei | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 10170297 | Compositions and methods using same for flowable oxide deposition | Daniel P. Spence | 2019-01-01 |