Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Matthew R. MacDonald +1 more | 2019-10-22 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Meiliang Wang, Xinjian Lei, Anupama Mallikarjunan, Bing Han | 2019-05-07 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |