Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468244 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei | 2019-11-05 |
| 10464953 | Carbon bridged aminosilane compounds for high growth rate silicon-containing films | Meiliang Wang, Xinjian Lei, Suresh K. Rajaraman | 2019-11-05 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-22 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Jianheng Li | 2019-09-24 |
| 10422034 | Silicon-based films and methods of forming the same | Xinjian Lei, Anupama Mallikarjunan, Matthew R. MacDonald | 2019-09-24 |
| 10319862 | Barrier materials for display devices | Robert Gordon Ridgeway, Andrew David Johnson, Anupama Mallikarjunan, Raymond Nicholas Vrtis, Xinjian Lei +3 more | 2019-06-11 |
| 10316407 | Compositions and methods using same for deposition of silicon-containing films | Xinjian Lei, Moo-Sung Kim, Matthew R. MacDonald | 2019-06-11 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10294250 | Organoaminosilanes and methods for making same | Matthew R. MacDonald, Richard Ho, Xinjian Lei | 2019-05-21 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Ronald Martin Pearlstein, Richard Ho, Daniel P. Spence, Xinjian Lei | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |