Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Masamichi Hara +2 more | 2019-11-05 |
| 10273571 | Film forming system | Yasunobu Suzuki | 2019-04-30 |