Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522467 | Ruthenium wiring and manufacturing method thereof | Toshiaki Fujisato, Cheonsoo Han | 2019-12-31 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Yumiko Kawano, Shuji AZUMO, Hiroki Murakami, Michitaka Aita, Koji Akiyama +2 more | 2019-11-26 |
| 10483100 | Method for forming TiON film | Masaki Koizumi, Masaki Sano, Seokhyoung HONG | 2019-11-19 |
| 10460988 | Removal method and processing method | Takeshi ITATANI, Kandabara Tapily, Kai-Hung Yu, Wanjae Park | 2019-10-29 |
| 10199451 | Lower electrode of DRAM capacitor and manufacturing method thereof | Masaki Koizumi, Masaki Sano, Seokhyoung HONG | 2019-02-05 |