MA

Michitaka Aita

TL Tokyo Electron Limited: 3 patents #40 of 763Top 6%
Overall (2019): #77,299 of 560,194Top 15%
3
Patents 2019

Issued Patents 2019

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10504698 Plasma processing apparatus Masayuki Kohno, Ryou Son, Naoki Matsumoto, Jun Yoshikawa, Ippei Shimizu +4 more 2019-12-10
10490443 Selective film forming method and method of manufacturing semiconductor device Yumiko Kawano, Shuji AZUMO, Hiroki Murakami, Tadahiro Ishizaka, Koji Akiyama +2 more 2019-11-26
10312057 Plasma processing apparatus Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Ippei Shimizu, Naoki Mihara +3 more 2019-06-04