Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504698 | Plasma processing apparatus | Masayuki Kohno, Ryou Son, Naoki Matsumoto, Jun Yoshikawa, Michitaka Aita +4 more | 2019-12-10 |
| 10319568 | Plasma processing apparatus for performing plasma process for target object | Naoki Mihara, Shunsuke Ogata | 2019-06-11 |
| 10312057 | Plasma processing apparatus | Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Naoki Mihara, Jun Yoshikawa +3 more | 2019-06-04 |