Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504698 | Plasma processing apparatus | Masayuki Kohno, Ryou Son, Jun Yoshikawa, Michitaka Aita, Ippei Shimizu +4 more | 2019-12-10 |
| 10438819 | Plasma processing apparatus and plasma processing method | — | 2019-10-08 |
| 10312057 | Plasma processing apparatus | Masayuki Kohno, Yusuke Yoshida, Ippei Shimizu, Naoki Mihara, Jun Yoshikawa +3 more | 2019-06-04 |
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Toshihisa Ozu, Takashi Tsukamoto, Kazuto Takai | 2019-03-05 |
| 10186451 | Group III nitride composite substrate and method for manufacturing the same, and method for manufacturing group III nitride semiconductor device | Akihiro Hachigo, Keiji Ishibashi | 2019-01-22 |
| 10167453 | Saccharide oxidase, and production method for same and use of same | Miho Nagaya, Akiko Sugita, Masamichi Okada | 2019-01-01 |