Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Toshihisa Ozu, Naoki Matsumoto, Takashi Tsukamoto | 2019-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224220 | Plasma processing apparatus and plasma etching apparatus | Toshihisa Ozu, Naoki Matsumoto, Takashi Tsukamoto | 2019-03-05 |