Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319568 | Plasma processing apparatus for performing plasma process for target object | Ippei Shimizu, Naoki Mihara | 2019-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319568 | Plasma processing apparatus for performing plasma process for target object | Ippei Shimizu, Naoki Mihara | 2019-06-11 |