Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522467 | Ruthenium wiring and manufacturing method thereof | Tadahiro Ishizaka, Toshiaki Fujisato | 2019-12-31 |
| 10190217 | Plasma film-forming method and plasma film-forming apparatus | Minoru Honda, Toshio Nakanishi, Masashi Imanaka | 2019-01-29 |