Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276405 | Plasma processing apparatus | Akinori Miyata, Hirofumi Haga, Nobutaka Nakao | 2019-04-30 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Katsuyuki Koizumi, Tomoyuki Takahashi, Dai KITAGAWA | 2019-02-05 |