Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515786 | Mounting table and plasma processing apparatus | Shingo KOIWA, Yasuhisa KUDO | 2019-12-24 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Shigeru Senzaki, Tomoyuki Takahashi, Dai KITAGAWA | 2019-02-05 |