Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10512125 | Mounting table and substrate processing apparatus | — | 2019-12-17 |
| 10374358 | Feeder-cover structure and semiconductor production apparatus | Ryota Sakane | 2019-08-06 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Katsuyuki Koizumi, Shigeru Senzaki, Tomoyuki Takahashi | 2019-02-05 |