Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515786 | Mounting table and plasma processing apparatus | Shingo KOIWA, Katsuyuki Koizumi | 2019-12-24 |
| 10340174 | Mounting table and plasma processing apparatus | Shin Yamaguchi, Daisuke Hayashi | 2019-07-02 |