AM

Akinori Miyata

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
📍 Rifu, JP: #90 of 288 inventorsTop 35%
Overall (2019): #553,809 of 560,194Top 100%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10276405 Plasma processing apparatus Shigeru Senzaki, Hirofumi Haga, Nobutaka Nakao 2019-04-30