Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283371 | Spacer-damage-free etching | Tsung-Min Huang, Chung-Ju Lee | 2019-05-07 |
| 10269634 | Semiconductor device having voids and method of forming same | Chien-Hua Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue | 2019-04-23 |
| 10170306 | Method of double patterning lithography process using plurality of mandrels for integrated circuit applications | Chung-Ju Lee, Hsin-Chieh Yao, Shau-Lin Shue, Tien-I Bao | 2019-01-01 |