Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504735 | Method of forming a semiconductor device by high-pressure anneal and post-anneal treatment | Hongfa Luan, Huicheng Chang, Cheng-Po Chau, Yi-Fan Chen, Chun-Yen Peng | 2019-12-10 |
| 10283384 | Method for etching etch layer and wafer etching apparatus | Manish Singh, Bo-Wei Chou, Jui-Ming Shih, Ping-Jung Huang, Pi-Chun Yu | 2019-05-07 |
| 10170313 | Systems and methods for a tunable electromagnetic field apparatus to improve doping uniformity | Chien-An Lai, Joseph Wu | 2019-01-01 |