MS

Ming-Feng Shieh

TSMC: 5 patents #407 of 3,065Top 15%
Overall (2019): #32,216 of 560,194Top 6%
5
Patents 2019

Issued Patents 2019

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
10424543 Overlay mark Chen Chen, Ching-Yu Chang 2019-09-24
10410913 Multi-layer metal contacts Wen-Hung Tseng, Chih-Ming Lai, Ken-Hsien Hsieh, Tsai-Sheng Gau, Ru-Gun Liu 2019-09-10
10276363 Mechanisms for forming patterns using multiple lithography processes Shih-Ming Chang, Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau 2019-04-30
10276392 Loading effect reduction through multiple coat-etch processes Jin-Dah Chen, Han-Wei Wu, Yu-Hsien Lin, Po-Chun Liu, Stan Chen 2019-04-30
10249570 Overlay mark Chen Chen, Ching-Yu Chang 2019-04-02