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Domenico Giusti, Nicolo′ Boni |
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Enri Duqi, Lorenzo Baldo |
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Oscillating structure with piezoelectric actuation, system and manufacturing method |
Massimiliano MERLI, Sebastiano Conti |
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MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method |
Domenico Giusti, Sonia Constantini |
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| 10288874 |
Mirror micromechanical structure and related manufacturing process |
Sebastiano Conti, Sonia Constantini |
2019-05-14 |
| 10225530 |
Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same |
Domenico Giusti |
2019-03-05 |
| 10197794 |
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Sonia Costantini, Marta Carminati, Daniela Angela Luisa Gatti, Laura Maria Castoldi |
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| 10175474 |
Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation |
Domenico Giusti, Massimiliano MERLI |
2019-01-08 |