Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method

MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method

US Patent 10310253 · Granted Jun 4, 2019

Estimated economic value: $9,888,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Biaxial microelectromechanical mirror device with piezoelectric actuation2025
Microelectromechanical mirror device with piezoelectric actuation having improve2025
PMUT array with presence of separate sensing small PZT on membranes edge2025
Packaged pressure sensor device and corresponding method for detecting the prese2025
Microfluidic device for spraying small drops of liquids2025
Microelectromechanical mirror device with compensation of planarity errors2025
Transducer assembly with buried cavities and method of manufacturing the same2025
Microelectromechanical mirror device with piezoelectric actuation and improved o2025
Microfluidic dispenser device for delivering inhalable substances2025
Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane el2025
Microelectromechanical mirror device with piezoelectric actuation and piezoresis2025
Microelectromechanical device having a structure tiltable by piezoelectric actua2025