Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473920 | Hermetically sealed MEMS mirror and method of manufacture | Sonia Costantini, Federico VERCESI, Roberto Carminati | 2019-11-12 |
| 10329141 | Encapsulated device of semiconductor material with reduced sensitivity to thermo-mechanical stresses | Alessandro Tocchio, Carlo Valzasina, Luca GUERINONI | 2019-06-25 |
| 10227233 | MEMS device formed by at least two bonded structural layers and manufacturing process thereof | Laura Oggioni, Matteo Garavaglia, Roberto Somaschini | 2019-03-12 |