Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488750 | Mask blank and making method | Hideo Kaneko | 2019-11-26 |
| 10466582 | Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus | — | 2019-11-05 |
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Takuro Kosaka, Kouhei Sasamoto, Hideo Kaneko | 2019-11-05 |
| 10459333 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Hideo Kaneko | 2019-10-29 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Kouhei Sasamoto, Takuro Kosaka, Hideo Kaneko | 2019-08-06 |