Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Kouhei Sasamoto, Hideo Kaneko | 2019-11-05 |
| 10459333 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko | 2019-10-29 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Kouhei Sasamoto, Yukio Inazuki, Hideo Kaneko | 2019-08-06 |