Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488750 | Mask blank and making method | Yukio Inazuki | 2019-11-26 |
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Takuro Kosaka, Kouhei Sasamoto | 2019-11-05 |
| 10459333 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Yukio Inazuki | 2019-10-29 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Kouhei Sasamoto, Takuro Kosaka, Yukio Inazuki | 2019-08-06 |